Invention Grant
- Patent Title: Methods of directed self-assembly and layered structures formed therefrom
- Patent Title (中): 定向自组装方法和从其形成的分层结构
-
Application No.: US12641987Application Date: 2009-12-18
-
Publication No.: US08828493B2Publication Date: 2014-09-09
- Inventor: Joy Cheng , William D. Hinsberg , Charles Thomas Rettner , Daniel Paul Sanders
- Applicant: Joy Cheng , William D. Hinsberg , Charles Thomas Rettner , Daniel Paul Sanders
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael R. Roberts
- Main IPC: B32B3/10
- IPC: B32B3/10 ; G03F7/16 ; G03F7/30 ; G03F7/38 ; G03F7/40 ; G03F7/20 ; G03F7/039 ; G03F7/09

Abstract:
Methods are disclosed for forming a layered structure comprising a self-assembled material. An initial patterned photoresist layer is treated photochemically, thermally, and/or chemically to form a treated patterned photoresist layer comprising a non-crosslinked treated photoresist. The treated photoresist is insoluble in an organic solvent suitable for casting a material capable of self-assembly. A solution comprising the material capable of self-assembly dissolved in the organic solvent is casted on the treated layer, and the organic solvent is removed. The casted material is allowed to self-assemble with optional heating and/or annealing, thereby forming the layered structure comprising the self-assembled material. The treated photoresist can be removed using an aqueous base and/or a second organic solvent.
Public/Granted literature
- US20110147985A1 METHODS OF DIRECTED SELF-ASSEMBLY AND LAYERED STRUCTURES FORMED THEREFROM Public/Granted day:2011-06-23
Information query