Invention Grant
US08828520B2 Micro-posts having improved uniformity and a method of manufacture thereof 有权
具有改进的均匀性的微柱和其制造方法

Micro-posts having improved uniformity and a method of manufacture thereof
Abstract:
As discussed herein, there is presented an apparatus comprising micro-posts. The apparatus includes a substrate having a planar surface, a plurality of micro-posts located on the planar surface, wherein each micro-post has a base portion on the planar surface and a post portion located on a top surface of the corresponding base portion, and wherein side surfaces of the base portions intersect the planar surface at oblique angles.
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