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US08828521B2 Corrugated interfaces for multilayered interconnects 有权
多层互连的波纹接口

Corrugated interfaces for multilayered interconnects
Abstract:
Dielectric composite structures comprising interfaces possessing nanometer scale corrugated interfaces in interconnect stack provide enhances adhesion strength and interfacial fracture toughness. Composite structures further comprising corrugated adhesion promoter layers to further increase intrinsic interfacial adhesion are also described. Methods to form the nanometer scale corrugated interfaces for enabling these structures using self assembling polymer systems and pattern transfer process are also described.
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