Invention Grant
- Patent Title: Method for local contacting and local doping of a semiconductor layer
- Patent Title (中): 局部接触和局部掺杂半导体层的方法
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Application No.: US13061158Application Date: 2009-08-20
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Publication No.: US08828790B2Publication Date: 2014-09-09
- Inventor: Ralf Preu , Andreas Grohe , Daniel Biro , Jochen Rentsch , Marc Hofmann , Jan-Frederik Nekarda , Andreas Wolf
- Applicant: Ralf Preu , Andreas Grohe , Daniel Biro , Jochen Rentsch , Marc Hofmann , Jan-Frederik Nekarda , Andreas Wolf
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Volpe and Koenig, P.C.
- Priority: DE102008044882 20080829
- International Application: PCT/EP2009/006037 WO 20090820
- International Announcement: WO2010/022889 WO 20100304
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; H01L21/225 ; H01L31/0224

Abstract:
A method for local contacting and local doping of a semiconductor layer including the following process steps: A) Generation of a layer structure on the semiconductor layer through i) application of at least one intermediate layer on one side of the semiconductor layer, and ii) application of at least one metal layer onto the intermediate layer last applied in step i), wherein the metal layer at least partly covers the last applied intermediate layer, B) Local heating of the layer structure in such a manner that in a local region a short-time melt-mixture of at least partial regions of at least the layers: metal layer, intermediate layer and semiconductor layer, forms. After solidification of the melt-mixture, a contacting is created between metal layer and semiconductor layer. It is essential that in step A) i) at least one intermediate layer designed as dopant layer is applied, which contains a dopant wherein the dopant has a greater solubility in the semiconductor layer than the metal of the metal layer.
Public/Granted literature
- US20110233711A1 METHOD FOR LOCAL CONTACTING AND LOCAL DOPING OF A SEMICONDUCTOR LAYER Public/Granted day:2011-09-29
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