Invention Grant
- Patent Title: Microstructure modification in copper interconnect structures
- Patent Title (中): 铜互连结构中的微结构改性
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Application No.: US14152127Application Date: 2014-01-10
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Publication No.: US08828870B2Publication Date: 2014-09-09
- Inventor: Cyril Cabral, Jr. , Jeffrey P. Gambino , Qiang Huang , Takeshi Nogami , Kenneth P. Rodbell
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Catherine Ivers; L. Jeffrey Kelly
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/288 ; H01L21/768 ; H01L23/532 ; H01L23/535

Abstract:
A metal interconnect structure and a method of manufacturing the metal interconnect structure. Manganese (Mn) is incorporated into a copper (Cu) interconnect structure in order to modify the microstructure to achieve bamboo-style grain boundaries in sub-90 nm technologies. Preferably, bamboo grains are separated at distances less than the “Blech” length so that copper (Cu) diffusion through grain boundaries is avoided. The added Mn also triggers the growth of Cu grains down to the bottom surface of the metal line so that a true bamboo microstructure reaching to the bottom surface is formed and the Cu diffusion mechanism along grain boundaries oriented along the length of the metal line is eliminated.
Public/Granted literature
- US20140127899A1 MICROSTRUCTURE MODIFICATION IN COPPER INTERCONNECT STRUCTURES Public/Granted day:2014-05-08
Information query
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