Invention Grant
US08828888B2 Protection of reactive metal surfaces of semiconductor devices during shipping by providing an additional protection layer
有权
通过提供额外的保护层,在运输过程中保护半导体器件的反应性金属表面
- Patent Title: Protection of reactive metal surfaces of semiconductor devices during shipping by providing an additional protection layer
- Patent Title (中): 通过提供额外的保护层,在运输过程中保护半导体器件的反应性金属表面
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Application No.: US13421154Application Date: 2012-03-15
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Publication No.: US08828888B2Publication Date: 2014-09-09
- Inventor: Matthias Lehr , Joerg Hohage , Andreas Ott
- Applicant: Matthias Lehr , Joerg Hohage , Andreas Ott
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Priority: DE102011005642 20110316
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L23/00 ; H01L23/31

Abstract:
When forming complex metallization systems on the basis of copper, the very last metallization layer may receive contact regions on the basis of copper, the surface of which may be passivated on the basis of a dedicated protection layer, which may thus allow the patterning of the passivation layer stack prior to shipping the device to a remote manufacturing site. Hence, the protected contact surface may be efficiently re-exposed in the remote manufacturing site on the basis of an efficient non-masked wet chemical etch process.
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