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US08829386B2 Inductive devices and low flow plasmas using them 有权
感应器件和低流量等离子体使用它们

Inductive devices and low flow plasmas using them
Abstract:
Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
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