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US08829478B2 Drive laser delivery systems for EUV light source 有权
驱动用于EUV光源的激光输送系统

Drive laser delivery systems for EUV light source
Abstract:
An EUV light source is disclosed herein which may comprise a droplet generator producing a stream of target material droplets, a first optical gain medium amplifying light on a first beam path without a seed laser providing a seed laser output to the first beam path, a second optical gain medium amplifying light on a second beam path without a seed laser providing a seed laser output to the second beam path, and a beam combiner combining light from the first beam path and the second beam path for interaction with a target material droplet to produce EUV light emitting plasma.
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