Invention Grant
- Patent Title: Drive laser delivery systems for EUV light source
- Patent Title (中): 驱动用于EUV光源的激光输送系统
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Application No.: US14087346Application Date: 2013-11-22
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Publication No.: US08829478B2Publication Date: 2014-09-09
- Inventor: Alexander I. Ershov
- Applicant: Cymer, LLC
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: ASML Netherlands B.V.
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H05G2/00 ; H01S3/23 ; G03F7/20 ; H01S3/10 ; H01S3/223

Abstract:
An EUV light source is disclosed herein which may comprise a droplet generator producing a stream of target material droplets, a first optical gain medium amplifying light on a first beam path without a seed laser providing a seed laser output to the first beam path, a second optical gain medium amplifying light on a second beam path without a seed laser providing a seed laser output to the second beam path, and a beam combiner combining light from the first beam path and the second beam path for interaction with a target material droplet to produce EUV light emitting plasma.
Public/Granted literature
- US20140077104A1 DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE Public/Granted day:2014-03-20
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