Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
-
Application No.: US13718351Application Date: 2012-12-18
-
Publication No.: US08829597B2Publication Date: 2014-09-09
- Inventor: Su-Chang Kwak
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2012-0084758 20120802
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L29/66

Abstract:
A nonvolatile memory device includes a plurality of channel connection layers formed over a substrate; a first gate electrode layer filling a space between the plurality channel connection layers; a gate dielectric layer interposed between each of the channel connection layers and the first gate electrode layer; a stacked structure formed over the plurality channel connection layers and the first gate electrode layer, the stacked structure including a plurality of interlayer dielectric layers and a plurality second gate electrode layers, which are alternately stacked; a pair of channel layers, formed through the stacked structure and connected to each channel connection layer of the plurality of channel connection layers; and a memory layer interposed between each of the channel layers and each of the second gate electrode layers.
Public/Granted literature
- US20140035025A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-02-06
Information query
IPC分类: