Invention Grant
- Patent Title: Piezoelectric actuator device
- Patent Title (中): 压电致动器装置
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Application No.: US13289792Application Date: 2011-11-04
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Publication No.: US08829765B2Publication Date: 2014-09-09
- Inventor: Min Tang
- Applicant: Min Tang
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Crockett & Crockett, PC
- Agent K. David Crockett, Esq.
- Priority: SG201008130-5 20101104
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/09

Abstract:
A piezoelectric actuator device includes a substrate anchor region; a support beam arrangement having first and second ends, wherein the first end is fixed to the anchor region and the second end is freely suspended; first and second beams having first and second ends, wherein the first end of each beam is mechanically fixed to at least a part of the second end of the support beam arrangement and the second end of each beam is freely suspended; a coupling beam mechanically coupling the second end of the first and second beams; wherein the first and second beams are arranged such that the first end of the support beam arrangement is located between the coupling beam and the second end of the support beam arrangement.
Public/Granted literature
- US20120112606A1 PIEZOELECTRIC ACTUATOR DEVICE Public/Granted day:2012-05-10
Information query
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