Invention Grant
US08829886B2 Systems and methods for defect detection using exoelectrons 有权
使用外电子进行缺陷检测的系统和方法

Systems and methods for defect detection using exoelectrons
Abstract:
An defect detection system includes an exoemission sensor having a conductive layer and an insulating layer. The exoemission sensor is mountable to a material of interest and configured to receive exoemissions from the material while in an atmosphere. The exoemission sensor outputs a signal based upon the received emissions. An analysis device is configured to receive the signal from the exoemission sensor and determine whether a defect is present in the material based upon the signal.
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