Invention Grant
- Patent Title: Exposure method for color filter substrate
- Patent Title (中): 滤色片基材的曝光方法
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Application No.: US13522626Application Date: 2011-01-11
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Publication No.: US08830610B2Publication Date: 2014-09-09
- Inventor: Kohei Matsui , Ryosuke Yasui , Keiichi Tanaka , Takenori Yoshizawa
- Applicant: Kohei Matsui , Ryosuke Yasui , Keiichi Tanaka , Takenori Yoshizawa
- Applicant Address: JP Tokyo JP Osaka
- Assignee: Toppan Printing Co., Ltd.,Sharp Kabushiki Kaisha
- Current Assignee: Toppan Printing Co., Ltd.,Sharp Kabushiki Kaisha
- Current Assignee Address: JP Tokyo JP Osaka
- Priority: JP2010-008512 20100118
- International Application: PCT/JP2011/000076 WO 20110111
- International Announcement: WO2011/086892 WO 20110721
- Main IPC: G02B5/22
- IPC: G02B5/22 ; G02B5/20 ; G02F1/1339 ; G02F1/1335

Abstract:
An exposure method is provided. In (a) of FIG. 8, exposure is performed while a substrate 20 is being transported in the Y direction, to simultaneously form first layers 81 and layers 91 in first non-display regions 51 and the display region, respectively, on the substrate 20. Next, in (b) of FIG. 8, the substrate 20 is rotated by 90 degrees, and exposure is performed while the substrate 20 is being transported in the X direction, to form second layers 82 in second non-display regions 52. Subsequently, in (c) of FIG. 8, proximity exposure is performed once on the substrate 20 to simultaneously form third layers 83 on the first layers 81 in the first non-display regions 51, fourth layers 84 on the second layers 82 in the second non-display regions 52, and layers 92 in the display region 40.
Public/Granted literature
- US20120300323A1 EXPOSURE METHOD FOR COLOR FILTER SUBSTRATE Public/Granted day:2012-11-29
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