Invention Grant
US08831170B2 Mirror with a mirror carrier and projection exposure apparatus 有权
镜子与镜子载体和投影曝光设备

Mirror with a mirror carrier and projection exposure apparatus
Abstract:
A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.
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