Invention Grant
- Patent Title: Mirror with a mirror carrier and projection exposure apparatus
- Patent Title (中): 镜子与镜子载体和投影曝光设备
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Application No.: US11934509Application Date: 2007-11-02
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Publication No.: US08831170B2Publication Date: 2014-09-09
- Inventor: Rutger Wevers , Andreas Seifert , Joachim Hartjes , Guenther Dengel
- Applicant: Rutger Wevers , Andreas Seifert , Joachim Hartjes , Guenther Dengel
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006052265 20061103
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G02B7/195 ; G02B17/06 ; G03F7/20

Abstract:
A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.
Public/Granted literature
- US20080144202A1 MIRROR WITH A MIRROR CARRIER AND PROJECTION EXPOSURE APPARATUS Public/Granted day:2008-06-19
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