Invention Grant
US08831765B2 Method for operating an automatic handling system applied to many wafer processing apparatuses
有权
用于操作适用于许多晶片处理设备的自动处理系统的方法
- Patent Title: Method for operating an automatic handling system applied to many wafer processing apparatuses
- Patent Title (中): 用于操作适用于许多晶片处理设备的自动处理系统的方法
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Application No.: US13336258Application Date: 2011-12-23
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Publication No.: US08831765B2Publication Date: 2014-09-09
- Inventor: Tsan-I Chen , Jung-Pin Lai
- Applicant: Tsan-I Chen , Jung-Pin Lai
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW100143314A 20111125
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
The instant disclosure provides a method for operating an automatic handling system applied to many wafer processing apparatuses. When a OHT (Overhead Hoist Transport) vehicle is moved to one of the wafer processing apparatuses, the OHT vehicle can ask a OHT control module whether a wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus. There are two judgment methods as follows: (1) If there is another wafer carrier device already disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device cannot be unloaded from the OHT vehicle onto the wafer processing apparatus; (2) If there is no any wafer carrier device disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus.
Public/Granted literature
- US20130138237A1 METHOD FOR OPERATING AN AUTOMATIC HANDLING SYSTEM APPLIED TO MANY WAFER PROCESSING APPARATUSES Public/Granted day:2013-05-30
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