Invention Grant
- Patent Title: Miniaturized piezoelectric accelerometers
- Patent Title (中): 小型化压电加速度计
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Application No.: US13202091Application Date: 2009-09-04
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Publication No.: US08833165B2Publication Date: 2014-09-16
- Inventor: Kui Yao , Saravanan Shanmugavel , Trung Dung Luong , Ajit S. Gaunekar , Hon Yu Peter Ng
- Applicant: Kui Yao , Saravanan Shanmugavel , Trung Dung Luong , Ajit S. Gaunekar , Hon Yu Peter Ng
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/SG2009/000315 WO 20090904
- International Announcement: WO2010/096020 WO 20100826
- Main IPC: G01P15/09
- IPC: G01P15/09 ; G01P15/18 ; G01P15/08

Abstract:
The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).
Public/Granted literature
- US20110296918A1 MINIATURIZED PIEZOELECTRIC ACCELEROMETERS Public/Granted day:2011-12-08
Information query
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