Invention Grant
US08833175B2 Structure and fabrication of a microscale flow-rate/skin friction sensor
有权
微量流量/皮肤摩擦传感器的结构和制造
- Patent Title: Structure and fabrication of a microscale flow-rate/skin friction sensor
- Patent Title (中): 微量流量/皮肤摩擦传感器的结构和制造
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Application No.: US13133303Application Date: 2009-03-13
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Publication No.: US08833175B2Publication Date: 2014-09-16
- Inventor: Vijay Chandrasekharan , Jeremy Sells , Mark Sheplak , David P. Arnold
- Applicant: Vijay Chandrasekharan , Jeremy Sells , Mark Sheplak , David P. Arnold
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Inc.
- Current Assignee: University of Florida Research Foundation, Inc.
- Current Assignee Address: US FL Gainesville
- Agency: Saliwanchik, Lloyd & Eisenschenk
- International Application: PCT/US2009/037158 WO 20090313
- International Announcement: WO2010/104518 WO 20100916
- Main IPC: G01L1/00
- IPC: G01L1/00 ; G01B7/16
Abstract:
A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.
Public/Granted literature
- US20110314924A1 STRUCTURE AND FABRICATION OF A MICROSCALE FLOW-RATE/SKIN FRICTION SENSOR Public/Granted day:2011-12-29
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