Invention Grant
- Patent Title: Imprinting machine and device manufacturing method
- Patent Title (中): 压印机和器件制造方法
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Application No.: US12710685Application Date: 2010-02-23
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Publication No.: US08834144B2Publication Date: 2014-09-16
- Inventor: Takashi Nakamura , Hirohisa Ota , Eigo Kawakami , Kazuyuki Kasumi , Toshinobu Tokita
- Applicant: Takashi Nakamura , Hirohisa Ota , Eigo Kawakami , Kazuyuki Kasumi , Toshinobu Tokita
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2004-356284 20041209
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F9/00 ; G03F7/00 ; B82Y10/00 ; B82Y40/00
Abstract:
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.
Public/Granted literature
- US20100148397A1 IMPRINTING MACHINE AND DEVICE MANUFACTURING METHOD Public/Granted day:2010-06-17
Information query
