Invention Grant
- Patent Title: Nanoporous membrane and manufacturing method thereof
- Patent Title (中): 纳米多孔膜及其制造方法
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Application No.: US13371838Application Date: 2012-02-13
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Publication No.: US08834730B2Publication Date: 2014-09-16
- Inventor: Dae Sik Lee , Jun Bo Yoon , Dong Hoon Choi , Byung Kee Lee , Moon Youn Jung , Seung Hwan Kim
- Applicant: Dae Sik Lee , Jun Bo Yoon , Dong Hoon Choi , Byung Kee Lee , Moon Youn Jung , Seung Hwan Kim
- Applicant Address: KR Daejeon
- Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR Daejeon
- Agency: Volpe and Koenig, P.C.
- Priority: KR10-2011-0049500 20110525
- Main IPC: B31D3/00
- IPC: B31D3/00 ; B82Y30/00 ; C23C14/02 ; C23C14/06 ; B82Y40/00 ; C23C16/56 ; C23F1/02
Abstract:
In the present invention, a nanoporous membrane having a columnar structure is manufactured through a deposition technology used in a semiconductor process, and the size of a nanopore is adjusted by etching the lower surface of the manufactured nanoporous membrane or using a seed layer and a nanobead layer so that scaling up is available at a lowered process temperature and the size of the nanopore can be easily adjusted when manufacturing the nanoporous membrane having a columnar structure.
Public/Granted literature
- US20120298625A1 NANOPOROUS MEMBRANE AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-11-29
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