Invention Grant
- Patent Title: Method of treating a gas stream
- Patent Title (中): 处理气流的方法
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Application No.: US11992906Application Date: 2006-09-21
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Publication No.: US08834824B2Publication Date: 2014-09-16
- Inventor: James Robert Smith , Peter Leslie Timms
- Applicant: James Robert Smith , Andrew David Wright
- Applicant Address: GB Crawley, West Sussex
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Crawley, West Sussex
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: GB0520468.0 20051007
- International Application: PCT/GB2006/003483 WO 20060921
- International Announcement: WO2007/042749 WO 20070419
- Main IPC: B01D53/68
- IPC: B01D53/68

Abstract:
A method is described for treating a gas stream comprising fluorine (F2) gas. In a preferred embodiment, the method comprises adding water vapor to a gas stream and conveying the gas stream and water vapor to a reaction chamber containing a heated bed of material to react with F2 to form an inorganic fluoride while inhibiting formation of CF4 within the reaction chamber, and at least partially evacuating the reaction chamber so that the gas stream is conveyed to and from the reaction chamber at sub-atmospheric pressure.
Public/Granted literature
- US20090297420A1 Method of Treating a Gas Stream Public/Granted day:2009-12-03
Information query
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