Invention Grant
- Patent Title: Method for producing a two-chip assembly and corresponding two-chip assembly
- Patent Title (中): 双芯片组装方法和相应的双芯片组装方法
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Application No.: US13623244Application Date: 2012-09-20
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Publication No.: US08835222B2Publication Date: 2014-09-16
- Inventor: Mathias Bruendel , Frieder Haag , Jens Frey , Rolf Speicher , Juergen Fritz , Lutz Rauscher
- Applicant: Mathias Bruendel , Frieder Haag , Jens Frey , Rolf Speicher , Juergen Fritz , Lutz Rauscher
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011083719 20110929
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00 ; H01L21/56 ; H01L21/50 ; H01L23/48 ; H01L23/00 ; H01L23/544 ; H01L21/768

Abstract:
A method for producing a two-chip assembly includes: providing a wafer having a first thickness, which wafer has a front side and a back side, a first plurality of first chips being provided on the front side of the wafer; attaching a second plurality of second chips on the front side of the wafer, so that every first chip is joined in each instance to a second chip and forms a corresponding two-chip pair; forming a cohesive mold package on the front side of the wafer, so that the second chips are packaged; thinning the wafer from the back side to a second thickness which is less than the first thickness; forming vias from the back side to the second chips; and separating the two-chip pairs into corresponding two-chip assemblies.
Public/Granted literature
- US20130082406A1 Method for producing a two-chip assembly and corresponding two-chip assembly Public/Granted day:2013-04-04
Information query
IPC分类: