Invention Grant
- Patent Title: Formation of high sheet resistance resistors and high capacitance capacitors by a single polysilicon process
- Patent Title (中): 通过单个多晶硅工艺形成高电阻电阻器和高容量电容器
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Application No.: US12928813Application Date: 2010-12-20
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Publication No.: US08835251B2Publication Date: 2014-09-16
- Inventor: YongZhong Hu , Sung-Shan Tai
- Applicant: YongZhong Hu , Sung-Shan Tai
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agent Bo-In Lin
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L49/02

Abstract:
A semiconductor device includes a transistor, a capacitor and a resistor wherein the capacitor includes a doped polysilicon layer to function as a bottom conductive layer with a salicide block (SAB) layer as a dielectric layer covered by a Ti/TiN layer as a top conductive layer thus constituting a single polysilicon layer metal-insulator-polysilicon (MIP) structure. While the high sheet rho resistor is also formed on the same single polysilicon layer with differential doping of the polysilicon layer.
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