Invention Grant
US08835251B2 Formation of high sheet resistance resistors and high capacitance capacitors by a single polysilicon process 有权
通过单个多晶硅工艺形成高电阻电阻器和高容量电容器

Formation of high sheet resistance resistors and high capacitance capacitors by a single polysilicon process
Abstract:
A semiconductor device includes a transistor, a capacitor and a resistor wherein the capacitor includes a doped polysilicon layer to function as a bottom conductive layer with a salicide block (SAB) layer as a dielectric layer covered by a Ti/TiN layer as a top conductive layer thus constituting a single polysilicon layer metal-insulator-polysilicon (MIP) structure. While the high sheet rho resistor is also formed on the same single polysilicon layer with differential doping of the polysilicon layer.
Information query
Patent Agency Ranking
0/0