Invention Grant
US08835581B2 Neutral layer polymer composition for directed self assembly and processes thereof
有权
用于定向自组装的中性层聚合物组合物及其工艺
- Patent Title: Neutral layer polymer composition for directed self assembly and processes thereof
- Patent Title (中): 用于定向自组装的中性层聚合物组合物及其工艺
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Application No.: US13492125Application Date: 2012-06-08
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Publication No.: US08835581B2Publication Date: 2014-09-16
- Inventor: Hengpeng Wu , Orest Polishchuk , Yi Cao , SungEun Hong , Jian Yin , Guanyang Lin , Margareta Paunescu , Mark Neisser
- Applicant: Hengpeng Wu , Orest Polishchuk , Yi Cao , SungEun Hong , Jian Yin , Guanyang Lin , Margareta Paunescu , Mark Neisser
- Applicant Address: LU Luxembourg
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agent Sangya Jain
- Main IPC: C08F4/04
- IPC: C08F4/04 ; C07C245/04
Abstract:
The present invention relates to a novel polymeric composition comprising a novel polymer having two or more repeat units and a terminus having the structure (1): wherein R1 represents a C1-C20 substituted or unsubstituted alkyl group, w is a number from 1-8, X is oxygen (O) or nitrogen (N), and Rd is a reactive group. The invention also relates to a process for forming a pattern using the novel polymeric composition. The invention further relates to a process of making the novel polymer.
Public/Granted literature
- US20130330668A1 NEUTRAL LAYER POLYMER COMPOSITION FOR DIRECTED SELF ASSEMBLY AND PROCESSES THEREOF Public/Granted day:2013-12-12
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