Invention Grant
US08835797B2 Method and device for the plasma treatment of running metal substrates
有权
用于等离子体处理金属基板的方法和装置
- Patent Title: Method and device for the plasma treatment of running metal substrates
- Patent Title (中): 用于等离子体处理金属基板的方法和装置
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Application No.: US12739305Application Date: 2008-10-06
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Publication No.: US08835797B2Publication Date: 2014-09-16
- Inventor: Pierre Vandenbrande
- Applicant: Pierre Vandenbrande
- Applicant Address: CH Neuhausen
- Assignee: Advanced Galvanisation AG
- Current Assignee: Advanced Galvanisation AG
- Current Assignee Address: CH Neuhausen
- Agency: Browdy and Neimark, PLLC
- Priority: EP07119011 20071022
- International Application: PCT/EP2008/063354 WO 20081006
- International Announcement: WO2009/053235 WO 20090430
- Main IPC: B23K10/00
- IPC: B23K10/00 ; H01J37/32

Abstract:
The invention relates to a method and a device for the plasma treatment of metal substrates or insulating substrates (3) running substantially continuously through a vacuum chamber having a treatment zone (2), the plasma being sustained by radiofrequency inductive coupling in the treatment zone (2) by means of an inductor (4) connected to a radiofrequency generator, in which the inductor (4) is protected from any contamination by the material emitted by the surface of the substrates (3) by means of a Faraday cage (7), which is positioned between the plasma and the inductor (4), and in which the Faraday cage (7) is on average electrically biassed positively with respect to the substrates (3) or with respect to a counter-electrode present in the plasma.
Public/Granted literature
- US20100308022A1 METHOD AND DEVICE FOR THE PLASMA TREATMENT OF RUNNING METAL SUBSTRATES Public/Granted day:2010-12-09
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