Invention Grant
US08835845B2 In-situ STEM sample preparation 有权
原位STEM样品制备

  • Patent Title: In-situ STEM sample preparation
  • Patent Title (中): 原位STEM样品制备
  • Application No.: US11809715
    Application Date: 2007-06-01
  • Publication No.: US08835845B2
    Publication Date: 2014-09-16
  • Inventor: Liang Hong
  • Applicant: Liang Hong
  • Applicant Address: US OR Hillsboro
  • Assignee: FEI Company
  • Current Assignee: FEI Company
  • Current Assignee Address: US OR Hillsboro
  • Agency: Scheinberg & Associates, PC
  • Agent Michael O. Scheinberg
  • Main IPC: G21K5/04
  • IPC: G21K5/04
In-situ STEM sample preparation
Abstract:
A method for TEM/STEM sample preparation and analysis that can be used in a FIB-electron microscope system without a flip stage. The method allows a dual beam FIB electron microscope system with a typical tilt stage having a maximum tilt of approximately 60° to be used to extract a TEM/STEM sample to from a substrate, mount the sample onto a sample holder, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to a vertical electron beam column for TEM/STEM imaging.
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