Invention Grant
- Patent Title: In-situ STEM sample preparation
- Patent Title (中): 原位STEM样品制备
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Application No.: US11809715Application Date: 2007-06-01
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Publication No.: US08835845B2Publication Date: 2014-09-16
- Inventor: Liang Hong
- Applicant: Liang Hong
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: G21K5/04
- IPC: G21K5/04

Abstract:
A method for TEM/STEM sample preparation and analysis that can be used in a FIB-electron microscope system without a flip stage. The method allows a dual beam FIB electron microscope system with a typical tilt stage having a maximum tilt of approximately 60° to be used to extract a TEM/STEM sample to from a substrate, mount the sample onto a sample holder, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to a vertical electron beam column for TEM/STEM imaging.
Public/Granted literature
- US20080296498A1 In-situ STEM sample preparation Public/Granted day:2008-12-04
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