Invention Grant
- Patent Title: Imaging a sample in a TEM equipped with a phase plate
- Patent Title (中): 在装有相位板的TEM中成像样品
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Application No.: US14015658Application Date: 2013-08-30
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Publication No.: US08835846B2Publication Date: 2014-09-16
- Inventor: Bart Buijsse , Marco Hugo Petrus Moers , Radostin Stoyanov Danev
- Applicant: FEI Company , Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Applicant Address: US OR Hillsboro DE
- Assignee: FEI Company,Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Current Assignee: FEI Company,Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Current Assignee Address: US OR Hillsboro DE
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP12182334 20120830
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.
Public/Granted literature
- US20140061463A1 IMAGING A SAMPLE IN A TEM EQUIPPED WITH A PHASE PLATE Public/Granted day:2014-03-06
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