Invention Grant
- Patent Title: Electron cyclotron resonance ion source device
- Patent Title (中): 电子回旋共振离子源装置
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Application No.: US13994251Application Date: 2011-12-13
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Publication No.: US08835871B2Publication Date: 2014-09-16
- Inventor: Olivier Delferriere , Olivier Tuske , Francis Harrault
- Applicant: Olivier Delferriere , Olivier Tuske , Francis Harrault
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1060578 20101215
- International Application: PCT/FR2011/052961 WO 20111213
- International Announcement: WO2012/080650 WO 20120621
- Main IPC: H01J27/16
- IPC: H01J27/16 ; H01J27/18 ; H01J37/32
Abstract:
An electron cyclotron resonance ion source device includes a plasma chamber configured to contain a plasma; a high-frequency system configured to transmit a high-frequency wave into the chamber; a magnetic field generator configured to generate a magnetic field in the chamber; an accelerating tube including an isolating structure and an extraction system, the magnetic field generator for generating a magnetic field being entirely located downstream of the isolating structure.
Public/Granted literature
- US20130327954A1 ELECTRON CYCLOTRON RESONANCE ION SOURCE DEVICE Public/Granted day:2013-12-12
Information query
