Invention Grant
- Patent Title: Electronic devices including carbon nano-tube films having boron nitride-based liners, and methods of forming the same
- Patent Title (中): 包括具有氮化硼基衬垫的碳纳米管膜的电子器件及其形成方法
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Application No.: US12608592Application Date: 2009-10-29
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Publication No.: US08835892B2Publication Date: 2014-09-16
- Inventor: Wipul Pemsiri Jayasekara
- Applicant: Wipul Pemsiri Jayasekara
- Applicant Address: US CA Milpitas
- Assignee: SanDisk 3D LLC
- Current Assignee: SanDisk 3D LLC
- Current Assignee Address: US CA Milpitas
- Agency: Dugan & Dugan, PC
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00 ; H01L27/24 ; B82Y10/00 ; H01L51/05 ; H01L51/00 ; G11C13/02
Abstract:
Methods in accordance with this invention form a microelectronic structure by forming a carbon nano-tube (“CNT”) layer, and forming a boron nitride layer (“BN liner”) above the CNT layer, wherein the BN liner comprises: (1) a first portion disposed above and in contact with the CNT layer; and/or (2) a second portion disposed in and/or around one or more carbon nano-tubes in the CNT layer. Numerous other aspects are provided.
Public/Granted literature
Information query
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