Invention Grant
US08835919B2 Thin film transistor substrate having metal oxide and method for manufacturing 有权
具有金属氧化物的薄膜晶体管基板及其制造方法

Thin film transistor substrate having metal oxide and method for manufacturing
Abstract:
A thin film transistor substrate and a method for manufacturing the same are disclosed. The thin film transistor substrate includes a gate electrode disposed on a substrate, a gate insulating film disposed on the gate electrode, an active layer disposed on the gate insulating film and including metal oxide, a source electrode contacted with one side of the active layer and a pixel electrode contacted with the other side of the active layer; and an etch stopper interposed between the source electrode and the pixel electrode.
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