Invention Grant
- Patent Title: Hybrid monolithic integration
- Patent Title (中): 混合单片集成
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Application No.: US13488398Application Date: 2012-06-04
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Publication No.: US08835988B2Publication Date: 2014-09-16
- Inventor: Fabio Alessio Marino , Paolo Menegoli
- Applicant: Fabio Alessio Marino , Paolo Menegoli
- Applicant Address: US CA San Jose
- Assignee: Eta Semiconductor Inc.
- Current Assignee: Eta Semiconductor Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/02 ; H01L27/06 ; H01L27/092 ; H01L29/778 ; H01L21/8258 ; H01L29/20

Abstract:
The present invention describes a hybrid integrated circuit comprising both CMOS and III-V devices, monolithically integrated in a single chip. It allows the almost complete elimination of the contamination issues related to the integration of different technologies, maintaining at the same time a good planarization of the structure. It further simplifies the fabrication process, allowing the growth of high quality III-V materials on (100) silicon substrates lowering the manufacturing cost. Moreover, differently from many prior art attempts, it does not require silicon on insulator technologies and/or other expensive process steps. This invention enables the consolidation on the same integrated circuit of a hybrid switching power converter that takes advantage of the established circuit topologies of CMOS circuitries and of the higher mobility and voltage withstanding of III-V HEMT devices.
Public/Granted literature
- US20120305992A1 HYBRID MONOLITHIC INTEGRATION Public/Granted day:2012-12-06
Information query
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