Invention Grant
- Patent Title: Electronic device including a trench and a conductive structure therein having a contact within a Schottky region and a process of forming the same
- Patent Title (中): 包括其中具有在肖特基区内具有接触的沟槽和导电结构的电子器件及其形成工艺
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Application No.: US13425030Application Date: 2012-03-20
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Publication No.: US08836024B2Publication Date: 2014-09-16
- Inventor: Balaji Padmanabhan , James Sellers
- Applicant: Balaji Padmanabhan , James Sellers
- Applicant Address: US AZ Phoenix
- Assignee: Semiconductor Components Industries, LLC
- Current Assignee: Semiconductor Components Industries, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Abel Law Group, LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
An electronic device can include a transistor structure, including a patterned semiconductor layer overlying a substrate, wherein the patterned semiconductor layer defines first and second trenches. The electronic device can also include a first conductive structure within the first trench, a gate electrode within the first trench and overlying the first conductive structure, a first insulating member within the second trench, and a second conductive structure within the second trench. The second conductive structure can include a first portion and a second portion overlying the first portion, the first insulating member can be disposed between the patterned semiconductor layer and the first portion of the second conductive structure; and the second portion of the second conductive structure can contact the patterned semiconductor layer at a Schottky region. Processes of forming the electronic device can take advantage of integrating formation of the Schottky region into a contact process flow.
Public/Granted literature
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