Invention Grant
- Patent Title: Electromechanical transducer and method of manufacturing the same
- Patent Title (中): 机电换能器及其制造方法
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Application No.: US12956046Application Date: 2010-11-30
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Publication No.: US08836052B2Publication Date: 2014-09-16
- Inventor: Hideyuki Itoh , Takahiro Ezaki
- Applicant: Hideyuki Itoh , Takahiro Ezaki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2009-284625 20091216
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
An electromechanical transducer includes multiple elements each having multiple cells, with each cell including a first electrode formed from a conductive substrate, and a second electrode opposed to a first face of the conductive substrate and across a gap. The multiple cells of each of the elements are electrically connected, and the conductive substrate is divided for each of the elements by grooves extending from the first face to a second face which is opposite from the first face. In addition, insulating films are formed on opposing side walls of the conductive substrate and define each of the grooves, wherein a gap width of each of the grooves is narrower on the second face side of the conductive substrate than on the first face side of the conductive substrate.
Public/Granted literature
- US20110140212A1 ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-06-16
Information query
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