Invention Grant
- Patent Title: Hybrid integrated component and method for the manufacture thereof
- Patent Title (中): 混合集成组件及其制造方法
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Application No.: US13890450Application Date: 2013-05-09
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Publication No.: US08836053B2Publication Date: 2014-09-16
- Inventor: Heribert Weber , Frank Fischer , Mirko Hattass , Yvonne Bergmann
- Applicant: Heribert Weber , Frank Fischer , Mirko Hattass , Yvonne Bergmann
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012208033 20120514
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00

Abstract:
A component system includes at least one MEMS element, a cap for a micromechanical structure of the MEMS element, and at least one ASIC substrate. The micromechanical structure of the MEMS element is implemented in the functional layer of an SOI wafer. The MEMS element is mounted face down, with the structured functional layer on the ASIC substrate, and the cap is implemented in the substrate of the SOI wafer. The ASIC substrate includes a starting substrate provided with a layered structure on both sides. At least one circuit level is implemented in each case both in the MEMS-side layered structure and in the rear-side layered structure of the ASIC substrate. In the ASIC substrate, at least one ASIC through contact is implemented which electrically contacts at least one circuit level of the rear-side layered structure and/or at least one circuit level of the MEMS-side layered structure.
Public/Granted literature
- US20130299924A1 HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF Public/Granted day:2013-11-14
Information query
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