Invention Grant
- Patent Title: MEMS structures and methods for forming the same
- Patent Title (中): MEMS结构及其形成方法
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Application No.: US13250078Application Date: 2011-09-30
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Publication No.: US08836055B2Publication Date: 2014-09-16
- Inventor: Lung Yuan Pan , Lan-Lin Chao , Chia-Shiung Tsai
- Applicant: Lung Yuan Pan , Lan-Lin Chao , Chia-Shiung Tsai
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L31/115
- IPC: H01L31/115
Abstract:
A device includes a micro-electro-mechanical system (MEMS) device, which includes a movable element and a fixed element. The movable element and the fixed element form two capacitor plates of a capacitor, with an air-gap between the movable element and the fixed element acting as a capacitor insulator of the capacitor. At least one of the movable element and the fixed element has a rugged surface.
Public/Granted literature
- US20130082338A1 MEMS Structures and Methods for Forming the Same Public/Granted day:2013-04-04
Information query
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