Invention Grant
- Patent Title: Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
- Patent Title (中): 磁轴承，旋转台和反射电子束光刻设备
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Application No.: US13265676Application Date: 2010-04-14
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Publication No.: US08836190B2Publication Date: 2014-09-16
- Inventor: Sahin Funda , Krijn Frederik Bustraan , Olav Seijger , Justus Bjorn Post
- Applicant: Sahin Funda , Krijn Frederik Bustraan , Olav Seijger , Justus Bjorn Post
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips N.V.
- Current Assignee: Koninklijke Philips N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP09158613 20090423
- International Application: PCT/IB2010/051598 WO 20100414
- International Announcement: WO2010/122450 WO 20101028
- Main IPC: H02K7/09
- IPC: H02K7/09 ; F16C32/04 ; H01J37/20
Abstract:
A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.
Public/Granted literature
- US20120038233A1 MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS Public/Granted day:2012-02-16
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