Invention Grant
US08836954B2 Optical profilometer using liquid crystal fabry-perot to project fringe pattern
有权
光学轮廓仪使用液晶fabry-perot来投影边缘图案
- Patent Title: Optical profilometer using liquid crystal fabry-perot to project fringe pattern
- Patent Title (中): 光学轮廓仪使用液晶fabry-perot来投影边缘图案
-
Application No.: US13005117Application Date: 2011-01-12
-
Publication No.: US08836954B2Publication Date: 2014-09-16
- Inventor: Hak-Rin Kim , Chang-Sub Park
- Applicant: Hak-Rin Kim , Chang-Sub Park
- Applicant Address: KR
- Assignee: Kyungpook National University Industry-Academic Cooperation Foundation
- Current Assignee: Kyungpook National University Industry-Academic Cooperation Foundation
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2010-0003499 20100114
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/25 ; H04N7/18

Abstract:
Provided is an optical surface profilometer. The optical surface profilometer includes a Fabry-Perot resonator into which liquid crystals are inserted, a light source which supplies coherent light to the Fabry-Perot resonator, and a convex lens which is disposed in an interference pattern emitting plane of the Fabry-Perot resonator, wherein the coherent light supplied from the light source is incident to the Fabry-Perot resonator, wherein, when the light is incident, the Fabry-Perot resonator emits an interference pattern generated in a resonance mode, and wherein the interference pattern is configured so that a number of circular fringes having the same center are disposed non-linearly. As a voltage is applied to the liquid crystal layer of the Fabry-Perot resonator, an effective refractive index is changed, so that a resonance mode condition of the Fabry-Perot resonator is changed. As a result, a diameter of the interference pattern is also changed. A 3D surface profile of the object is measured by measuring and analyzing the change of the interference patterns.
Public/Granted literature
- US20110205356A1 OPTICAL SURFACE PROFILOMETER AND METHOD THEREOF Public/Granted day:2011-08-25
Information query