Invention Grant
US08837041B2 Magnifying imaging optical system and metrology system with an imaging optical system of this type
有权
具有这种成像光学系统的放大成像光学系统和计量系统
- Patent Title: Magnifying imaging optical system and metrology system with an imaging optical system of this type
- Patent Title (中): 具有这种成像光学系统的放大成像光学系统和计量系统
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Application No.: US13302147Application Date: 2011-11-22
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Publication No.: US08837041B2Publication Date: 2014-09-16
- Inventor: Hans-Juergen Mann , Heiko Feldmann
- Applicant: Hans-Juergen Mann , Heiko Feldmann
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B17/00
- IPC: G02B17/00 ; G02B17/06

Abstract:
A magnifying imaging optical system is disclosed that has precisely three mirrors, which image an object field in an object plane into an image field in an image plane. A ratio between a transverse dimension of the image field and a transverse dimension measured in the same direction of a useful face of the last mirror before the image field is greater than 3. In a further aspect, the magnifying imaging optical system is disclosed that has at least three mirrors, which image an object field in an object plane in an image field in an image plane. A first mirror in the beam path after the object field is concave, a second mirror is also concave and a third mirror is convex. An angle of incidence of imaging beams on the last mirror before the image field is less than 15°.
Public/Granted literature
- US20120127566A1 MAGNIFYING IMAGING OPTICAL SYSTEM AND METROLOGY SYSTEM WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE Public/Granted day:2012-05-24
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |