Invention Grant
- Patent Title: Masks for double patterning photolithography
- Patent Title (中): 双面图案光刻的面具
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Application No.: US13977630Application Date: 2011-12-29
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Publication No.: US08839160B2Publication Date: 2014-09-16
- Inventor: Carlos R. Castro-Pareja , Allan Xiao Yu Gu
- Applicant: Carlos R. Castro-Pareja , Allan Xiao Yu Gu
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/US2011/067894 WO 20111229
- International Announcement: WO2013/101090 WO 20130704
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/68

Abstract:
Improved masks for double patterning lithography are described. In one example, conflict spaces between features of a target design are identified. The conflict spaces are represented as nodes of a graph. Connections are inserted between nodes based on a local search. The connections are cut to determine double patterning mask assignment. The connections are extended to form a checkerboard that is then overlayed on the target mask design to split the features of the target mask design for double patterning.
Public/Granted literature
- US20140047398A1 MASKS FOR DOUBLE PATTERNING PHOTOLITHOGRAPHY Public/Granted day:2014-02-13
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