Invention Grant
- Patent Title: Apparatus for thin-film deposition
- Patent Title (中): 薄膜沉积设备
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Application No.: US13155529Application Date: 2011-06-08
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Publication No.: US08840726B2Publication Date: 2014-09-23
- Inventor: Zilan Li , Teng Hock Kuah , Jiapei Ding , Ravindra Raghavendra
- Applicant: Zilan Li , Teng Hock Kuah , Jiapei Ding , Ravindra Raghavendra
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23F1/00 ; H01L21/306 ; C23C16/30 ; C23C16/06 ; C23C16/22

Abstract:
An apparatus 101 for depositing a thin-film onto a surface of a substrate 113 using precursor gases G1, G2 is disclosed. The apparatus 101 comprises i) a supporting device 111 for holding the substrate 113; and ii) a spinner 105 positioned adjacent to the supporting device 111. Specifically, the spinner 105 includes a hub 106 for connecting to a motor, and one or more blades 201 connected to the hub 106. In particular, the one or more blades 201 are operative to rotate around the hub 106 on a plane to drive a fluid flow of the precursor gases G1, G2, so as to distribute the precursor gases G1, G2 across the surface of the substrate 113.
Public/Granted literature
- US20120312231A1 APPARATUS FOR THIN-FILM DEPOSITION Public/Granted day:2012-12-13
Information query
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