Invention Grant
US08840860B2 Contamination free compression of corrosive gas 有权
无腐蚀性气体的无污染压缩

Contamination free compression of corrosive gas
Abstract:
A process for the synthesis of a high purity corrosive gas generated by decomposition of a precursor solid at high temperature deploys a dry vacuum pump and a compressor in series so that the corrosive gas is pressured as it fills storage containers.
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