Invention Grant
US08841059B2 Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition 有权
交联剂,负性抗蚀剂组合物和使用负性抗蚀剂组合物的图案形成方法

Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition
Abstract:
A negative resist composition, which shows excellent sensitivity and resolution in pattern formation by exposure to electron beams or EUV, a novel crosslinking agent suitable for the resist composition, and a pattern forming method using the resist composition are presented. The negative resist composition comprises: (A) a polyphenol compound comprising two or more phenolic hydroxyl groups in a molecule thereof and having a molecular weight of 300 to 3,000, (B) an acid generator which directly or indirectly produces acid by exposure to active energy rays having a wavelength of 248 nm or less, and (C) a crosslinking agent represented by the chemical formula (1).
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