Invention Grant
US08841059B2 Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition
有权
交联剂,负性抗蚀剂组合物和使用负性抗蚀剂组合物的图案形成方法
- Patent Title: Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition
- Patent Title (中): 交联剂,负性抗蚀剂组合物和使用负性抗蚀剂组合物的图案形成方法
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Application No.: US13121236Application Date: 2009-09-29
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Publication No.: US08841059B2Publication Date: 2014-09-23
- Inventor: Kenichi Okuyama , Yasunori Nagatsuka
- Applicant: Kenichi Okuyama , Yasunori Nagatsuka
- Applicant Address: JP Tokyo-to
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Tokyo-to
- Agency: Ladas & Parry LLP
- Priority: JP2008-252552 20080930
- International Application: PCT/JP2009/066960 WO 20090929
- International Announcement: WO2010/038742 WO 20100408
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/20 ; G03F7/30 ; G03F7/38

Abstract:
A negative resist composition, which shows excellent sensitivity and resolution in pattern formation by exposure to electron beams or EUV, a novel crosslinking agent suitable for the resist composition, and a pattern forming method using the resist composition are presented. The negative resist composition comprises: (A) a polyphenol compound comprising two or more phenolic hydroxyl groups in a molecule thereof and having a molecular weight of 300 to 3,000, (B) an acid generator which directly or indirectly produces acid by exposure to active energy rays having a wavelength of 248 nm or less, and (C) a crosslinking agent represented by the chemical formula (1).
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