Invention Grant
US08841196B1 Selective deposition of silver for non-volatile memory device fabrication
有权
选择性沉积银用于非易失性存储器件制造
- Patent Title: Selective deposition of silver for non-volatile memory device fabrication
- Patent Title (中): 选择性沉积银用于非易失性存储器件制造
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Application No.: US13249115Application Date: 2011-09-29
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Publication No.: US08841196B1Publication Date: 2014-09-23
- Inventor: Scott Brad Harold
- Applicant: Scott Brad Harold
- Applicant Address: US CA Santa Clara
- Assignee: Crossbar, Inc.
- Current Assignee: Crossbar, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Ogawa P.C.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method of forming a non-volatile memory device includes providing a semiconductor substrate having a surface region, thereafter forming a first dielectric layer overlying, thereafter forming a first wiring material, thereafter forming amorphous silicon layer, and patterning and etching these layers to form first structures extending in a first direction and having a switching element. Thereafter, a method may include depositing a second dielectric layer overlying the first structures and having a dielectric surface region, forming an opening region in the second dielectric material to exposing part of the switching element, and depositing a silver material in the opening region, but not on the dielectric surface region.
Information query
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