Invention Grant
US08841196B1 Selective deposition of silver for non-volatile memory device fabrication 有权
选择性沉积银用于非易失性存储器件制造

  • Patent Title: Selective deposition of silver for non-volatile memory device fabrication
  • Patent Title (中): 选择性沉积银用于非易失性存储器件制造
  • Application No.: US13249115
    Application Date: 2011-09-29
  • Publication No.: US08841196B1
    Publication Date: 2014-09-23
  • Inventor: Scott Brad Harold
  • Applicant: Scott Brad Harold
  • Applicant Address: US CA Santa Clara
  • Assignee: Crossbar, Inc.
  • Current Assignee: Crossbar, Inc.
  • Current Assignee Address: US CA Santa Clara
  • Agency: Ogawa P.C.
  • Main IPC: H01L21/20
  • IPC: H01L21/20
Selective deposition of silver for non-volatile memory device fabrication
Abstract:
A method of forming a non-volatile memory device includes providing a semiconductor substrate having a surface region, thereafter forming a first dielectric layer overlying, thereafter forming a first wiring material, thereafter forming amorphous silicon layer, and patterning and etching these layers to form first structures extending in a first direction and having a switching element. Thereafter, a method may include depositing a second dielectric layer overlying the first structures and having a dielectric surface region, forming an opening region in the second dielectric material to exposing part of the switching element, and depositing a silver material in the opening region, but not on the dielectric surface region.
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