Invention Grant
- Patent Title: Thin-film transistor device and method for manufacturing thin-film transistor device
- Patent Title (中): 薄膜晶体管器件及薄膜晶体管器件的制造方法
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Application No.: US13742481Application Date: 2013-01-16
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Publication No.: US08841673B2Publication Date: 2014-09-23
- Inventor: Arinobu Kanegae , Takahiro Kawashima , Hiroshi Hayashi , Genshirou Kawachi
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka JP Hyogo
- Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee Address: JP Osaka JP Hyogo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2011-145870 20110630
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L29/10 ; H01L29/18

Abstract:
A thin-film transistor device includes: a gate electrode above a substrate; a gate insulating film on the gate electrode; a crystalline silicon thin film above the gate insulating film; a first semiconductor film above the crystalline silicon thin film; a pair of second semiconductor films above the first semiconductor film; a source electrode over one of the second semiconductor films; and a drain electrode over an other one of the second semiconductor films. The first semiconductor film is provided on the crystalline silicon thin film. A relationship ECP
Public/Granted literature
- US20130126869A1 THIN-FILM TRANSISTOR DEVICE AND METHOD FOR MANUFACTURING THIN-FILM TRANSISTOR DEVICE Public/Granted day:2013-05-23
Information query
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