Invention Grant
- Patent Title: Thin-film transistor device and method for manufacturing thin-film transistor device
- Patent Title (中): 薄膜晶体管器件及薄膜晶体管器件的制造方法
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Application No.: US13737275Application Date: 2013-01-09
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Publication No.: US08841678B2Publication Date: 2014-09-23
- Inventor: Arinobu Kanegae , Takahiro Kawashima , Hiroshi Hayashi , Genshirou Kawachi
- Applicant: Panasonic Corporation , Panasonic Liquid Crystal Display Co., Ltd.
- Applicant Address: JP Osaka JP Hyogo
- Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- Current Assignee Address: JP Osaka JP Hyogo
- Agency: Greenblum & Bernstein, P.L.C.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/786 ; H01L29/04 ; H01L29/66

Abstract:
A thin-film transistor device includes: a gate electrode above a substrate; a gate insulating film on the gate electrode; a crystalline silicon thin film including a channel region which is provided on the gate insulating film; semiconductor films on at least the channel region; an insulating film made of an organic material which is provided over the channel region and above the semiconductor films; a source electrode over at least an end portion of the insulating film; and a drain electrode over at least the other end portion of the insulating film and facing the source electrode. The semiconductor films include at least a first semiconductor film and a second semiconductor film provided on the first semiconductor film. A relationship ECP
Public/Granted literature
- US20130119391A1 THIN-FILM TRANSISTOR DEVICE AND METHOD FOR MANUFACTURING THIN-FILM TRANSISTOR DEVICE Public/Granted day:2013-05-16
Information query
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