Invention Grant
- Patent Title: Nitride based semiconductor device and manufacturing method thereof
- Patent Title (中): 氮化物基半导体器件及其制造方法
-
Application No.: US13406123Application Date: 2012-02-27
-
Publication No.: US08841704B2Publication Date: 2014-09-23
- Inventor: Young Hwan Park , Woo Chul Jeon , Ki Yeol Park , Seok Yoon Hong
- Applicant: Young Hwan Park , Woo Chul Jeon , Ki Yeol Park , Seok Yoon Hong
- Applicant Address: KR Suwon, Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon, Gyunggi-Do
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Priority: KR10-2011-0133192 20111212
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
Disclosed herein is a nitride based semiconductor device, including: a substrate; a nitride based semiconductor layer having a lower nitride based semiconductor layer and an upper nitride based semiconductor layer on the substrate; an isolation area including an interface between the lower nitride based semiconductor layer and the upper nitride based semiconductor layer; and drain electrodes, source electrode, and gate electrodes formed on the upper nitride based semiconductor layer. According to preferred embodiments of the present invention, in the nitride based semiconductor device, by using the isolation area including the interface between the lower nitride based semiconductor layer and the upper nitride based semiconductor layer, problems of parasitic capacitance and leakage current are solved, and as a result, a switching speed can be improved through a gate pad.
Public/Granted literature
- US20130146983A1 NITRIDE BASED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-06-13
Information query
IPC分类: