Invention Grant
- Patent Title: MEMS device and process
- Patent Title (中): MEMS器件和工艺
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Application No.: US12678884Application Date: 2008-09-18
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Publication No.: US08841737B2Publication Date: 2014-09-23
- Inventor: Richard Ian Laming , Colin Robert Jenkins
- Applicant: Richard Ian Laming , Colin Robert Jenkins
- Applicant Address: GB Edinburgh
- Assignee: Wolfson Microelectronics plc
- Current Assignee: Wolfson Microelectronics plc
- Current Assignee Address: GB Edinburgh
- Agency: Dickstein Shapiro LLP
- Priority: GB0718305.6 20070919
- International Application: PCT/GB2008/003165 WO 20080918
- International Announcement: WO2009/037458 WO 20090326
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/306 ; B81B3/00 ; H04R19/00
Abstract:
A MEMS comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) of the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.
Public/Granted literature
- US20100308425A1 MEMS DEVICE AND PROCESS Public/Granted day:2010-12-09
Information query
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