Invention Grant
- Patent Title: Probe card wiring structure
- Patent Title (中): 探头卡接线结构
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Application No.: US13014846Application Date: 2011-01-27
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Publication No.: US08841931B2Publication Date: 2014-09-23
- Inventor: Yung-Hsin Kuo , Wensen Hung
- Applicant: Yung-Hsin Kuo , Wensen Hung
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G01R31/20
- IPC: G01R31/20 ; G01R31/00 ; G01R1/073

Abstract:
The present disclosure provides a probe card for wafer level testing. The probe card includes a space transformer having first power/ground lines and first signal lines embedded therein, wherein the first power/ground and signal lines are configured to have a first wiring pitch on a first surface and a second wiring pitch on a second surface, the second wiring pitch being substantially less than the first wiring pitch; a printed circuit board bonded to the first surface of the space transformer, wherein the printed circuit board includes second power/ground lines and second signal lines embedded in the printed circuit board and coupled to the first power/ground and signal lines; and conductive lines configured to a surface of the printed circuit board remote to the first surface of the space transformer, wherein each of the conductive lines includes a first end coupled to one of the second signal lines and a second end coupled to a different location of the printed circuit board.
Public/Granted literature
- US20120194210A1 PROBE CARD WIRING STRUCTURE Public/Granted day:2012-08-02
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