Invention Grant
- Patent Title: Device for testing the quality of microstructurization
- Patent Title (中): 用于测试微结构化质量的设备
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Application No.: US13809207Application Date: 2011-07-08
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Publication No.: US08842271B2Publication Date: 2014-09-23
- Inventor: Udo Meyer , Susanne Markus , Stefan Dieckhoff
- Applicant: Udo Meyer , Susanne Markus , Stefan Dieckhoff
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Preti Flaherty Beliveau & Pachios LLP
- Priority: DE102010031227 20100712
- International Application: PCT/EP2011/061699 WO 20110708
- International Announcement: WO2012/007404 WO 20120119
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/956 ; G01B11/24 ; G01N21/47 ; G01B11/30

Abstract:
A device for testing the quality of microstructurization of a surface (2) having a known target microstructurization quality, comprising a radiation source (1) for coherent radiation, a first detector (10) and a second detector (4) and a masking system, all of which are set up and arranged with respect to one another so that radiation emitted by the radiation source (1) onto the surface (2) produces a diffraction pattern, wherein the diffraction maximum of order n of the diffraction pattern without the masking system would impinge on the first detector (10), the masking system prevents 80% of the photons that are assigned to the diffraction maximum of order n from impinging on the first detector and the diffraction maximum of order a of the diffraction pattern impinges on the second detector (4), wherein n is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9 and 10 and a is selected from the group consisting of 1, 2, 3, 4, 5, 6, 7, 8, 9 and 10 and a≠n.
Public/Granted literature
- US20130107278A1 DEVICE FOR TESTING THE QUALITY OF MICROSTRUCTURIZATION Public/Granted day:2013-05-02
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