Invention Grant
US08845868B2 Seal and fixation assembly for a rotating cylindrical magnetron electrode
有权
用于旋转圆柱形磁控管电极的密封和固定组件
- Patent Title: Seal and fixation assembly for a rotating cylindrical magnetron electrode
- Patent Title (中): 用于旋转圆柱形磁控管电极的密封和固定组件
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Application No.: US13309627Application Date: 2011-12-02
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Publication No.: US08845868B2Publication Date: 2014-09-30
- Inventor: Richard Newcomb
- Applicant: Richard Newcomb
- Applicant Address: US PA Duquesne
- Assignee: Angstrom Sciences, Inc.
- Current Assignee: Angstrom Sciences, Inc.
- Current Assignee Address: US PA Duquesne
- Agency: The Webb Law Firm
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A seal and fixation assembly includes a cylindrical target having an inside surface with a shoulder that forms a stop within the target. A target retaining ring is disposed about the target. A seal plate is disposed within the target and engages the stop and the inside surface of the target. An end cap is disposed on the end of the target and includes a portion with a beveled surface within the target. A sealing element is disposed between the inside surface of the target, the seal plate, and the beveled surface of the end cap. A clamp is disposed over the end cap and the target retaining ring. Engagement of the end cap and the target retaining ring with the clamp causes the end cap to move within the target toward the stop to compress the sealing element between the target, the seal plate, and the beveled surface.
Public/Granted literature
- US20120146504A1 Seal and Fixation Assembly for a Rotating Cylindrical Magnetron Electrode Public/Granted day:2012-06-14
Information query
IPC分类: