Invention Grant
US08846291B2 Resist composition, method of forming resist pattern, and new compound
有权
抗蚀剂组合物,形成抗蚀剂图案的方法和新化合物
- Patent Title: Resist composition, method of forming resist pattern, and new compound
- Patent Title (中): 抗蚀剂组合物,形成抗蚀剂图案的方法和新化合物
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Application No.: US13312013Application Date: 2011-12-06
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Publication No.: US08846291B2Publication Date: 2014-09-30
- Inventor: Yoshiyuki Utsumi , Kenichiro Miyashita , Akiya Kawaue
- Applicant: Yoshiyuki Utsumi , Kenichiro Miyashita , Akiya Kawaue
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co. Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co. Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JPP2010-273831 20101208
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C303/32 ; C07C309/07 ; C07D213/79 ; C07D213/80 ; C07D215/48 ; C07D215/50 ; C07D215/54 ; C07D219/04 ; C07D221/10 ; G03F7/039

Abstract:
A resist composition including: a base component (A) which exhibits changed solubility in a developing solution under action of acid; a nitrogen-containing organic compound component (C) containing a compound (C1) represented by general formula (c1) shown below; and an acid generator component (B) which generates acid upon exposure, provided that the compound (C1) is excluded from the acid generator component (B): wherein RN represents a nitrogen-containing heterocyclic group which may have a substituent; X0 represents a linear or branched divalent aliphatic hydrocarbon group of 1 to 10 carbon atoms, a cyclic divalent aliphatic hydrocarbon group of 3 to 20 carbon atoms or a divalent aliphatic hydrocarbon group of 3 to 20 carbon having a cyclic partial structure, or any one of these groups in which some or all of the hydrogen atoms thereof have been substituted with fluorine atoms; and M+ represents an organic cation.
Public/Granted literature
- US20120148955A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND NEW COMPOUND Public/Granted day:2012-06-14
Information query
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