Invention Grant
- Patent Title: Radiation-sensitive composition
- Patent Title (中): 辐射敏感组合物
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Application No.: US13339662Application Date: 2011-12-29
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Publication No.: US08846292B2Publication Date: 2014-09-30
- Inventor: Masatoshi Echigo , Dai Oguro
- Applicant: Masatoshi Echigo , Dai Oguro
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2006-299522 20061102; JP2007-113185 20070423; JP2007-113186 20070423; JP2007-124918 20070509; JP2007-139763 20070525; JP2007-139764 20070525
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/09 ; G03F7/20 ; G03F7/30 ; G03F7/36

Abstract:
A radiation-sensitive composition containing a resist compound having a high sensitivity, a high resolution, a high etching resistance, and a low outgas which forms a resist pattern with good shape and a method of forming a resist pattern and novel compositions for forming a photoresist under coat film which is excellent in optical properties and etching resistance and contains substantially no sublimable substance and an under coat film formed by the composition. Radiation-sensitive composition containing a solvent and a cyclic compound having, e.g., a cyclic compound (A) having a molecular weight of 700 to 5000 which is synthesized by the condensation reaction of a compound having 2 to 59 carbon atoms and 1 to 4 formyl groups with a compound having 6 to 15 carbon atoms and 1 to 3 phenolic hydroxyl groups, and a cyclic compound for use in the radiation-sensitive composition.
Public/Granted literature
- US20120171379A1 RADIATION-SENSITIVE COMPOSITION Public/Granted day:2012-07-05
Information query
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